Analysis by using X-ray photoelectron spectroscopy for polymethyl methacrylate and polytetrafluoroethylene etched by KrF excimer laser

✍ Scribed by X.L. Zhu; S.B. Liu; B.Y. Man; C.Q. Xie; D.P. Chen; D.Q. Wang; T.C. Ye; M. Liu

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 658 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2006.07.002