✦ LIBER ✦
Analysis and simulation of diffractive imaging field in thick film photoresist by using angular spectrum theory
✍ Scribed by Tang Xionggui; Gao Fuhua; Guo Yongkang; Du Jinglei; Liu Shijie; Gao Feng
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 522 KB
- Volume
- 244
- Category
- Article
- ISSN
- 0030-4018
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