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Analysis and optimization of x-ray masks using finite element methods

✍ Scribed by D.L. Laird; P.E. Lenius; R.L. Engelstad; F. Cerrina

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 402 KB
Volume: 17
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(92)90043-q

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