𝔖 Bobbio Scriptorium
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Analysis and operating characteristics of micro gas–flow sensor using magnetic fluid

✍ Scribed by Hideo Oka; Paul P. Biringer


Book ID
112078414
Publisher
John Wiley and Sons
Year
1990
Tongue
English
Weight
849 KB
Volume
73
Category
Article
ISSN
8756-663X

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## Abstract Gas flow in micro‐electro‐mechanical systems can be considered as rarefied since the ratio of free molecular path length to the characteristic length of the device is high. It is possible to analyse these flows using a conventional Navier–Stokes solver with modified boundary conditions