✦ LIBER ✦
Analysis and Kinetics of Transient Species in Electrode Near Plasma and Plasma Boundary Sheath of RF Plasmas in Molecular Gases
✍ Scribed by M. Geigl; S. Peters; O. Gabriel; B. Krames; J. Meichsner
- Publisher
- John Wiley and Sons
- Year
- 2005
- Tongue
- English
- Weight
- 297 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0005-8025
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