A linear model application for the desig
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G. Golan; A. Axelevitch; E. Rabinovitch
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Article
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1998
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Elsevier Science
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English
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Highly transparent conductive indium oxide (In203) thin films were prepared by DC magnetron sputtering using a pure indium oxide target in an argon atmosphere. A linear programming method for the production design of these thin films using a sputtering process was proposed. Sputtering model calculat