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Analysis and Analytical Modeling of Static Pull-In With Application to MEMS-Based Voltage Reference and Process Monitoring

✍ Scribed by Rocha, L.A.; Cretu, E.; Wolffenbuttel, R.F.

Book ID: 121207031
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 847 KB
Volume: 13
Category: Article
ISSN: 1057-7157
DOI: 10.1109/JMEMS.2004.824892

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