Analog micro-optics fabrication by use of a two-dimensional binary phase-grating mask

✍ Scribed by Sung, Jinwon; Hockel, Heidi; Johnson, Eric G.

• Book ID: 115427143
• Publisher: Optical Society of America
• Year: 2005
• Tongue: English
• Weight: 561 KB
• Volume: 30
• Category: Article
• ISSN: 0146-9592
• DOI: 10.1364/OL.30.000150