✦ LIBER ✦
Anaerobic biodegradability and methanogenic toxicity of key constituents in copper chemical mechanical planarization effluents of the semiconductor industry
✍ Scribed by Jeremy Hollingsworth; Reyes Sierra-Alvarez; Michael Zhou; Kimberly L. Ogden; Jim A. Field
- Book ID
- 116357243
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 173 KB
- Volume
- 59
- Category
- Article
- ISSN
- 0045-6535
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