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An XPS study of the adherence of refractory carbide silicide and boride rf-sputtered wear-resistant coatings

✍ Scribed by Brainard, William A.

Book ID: 121750410
Publisher: AVS (American Vacuum Society)
Year: 1978
Weight: 818 KB
Volume: 15
Category: Article
ISSN: 0022-5355
DOI: 10.1116/1.569845

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An XPS study of the adherence of refract

An XPS study of the adherence of refractory carbide, silicide and boride rf sputtered wear-resistant coatings

📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 157 KB

the film morphology became discontinuous, leading to a welldeveloped island structure. Desorption energies of 0.33 eV on Al and sapphire and 0.40 eV on glass were obtained from the temperature dependence of the sticking fraction.