✦ LIBER ✦
An X-ray Photoelectron Spectroscopy Investigation of Redeposition from Fluorine-based Plasma Etch on Magnetic Recording Slider Head Substrate
✍ Scribed by A. Limcharoen; C. Pakpum; P. Limsuwan
- Book ID
- 119357513
- Publisher
- Elsevier
- Year
- 2012
- Tongue
- English
- Weight
- 465 KB
- Volume
- 32
- Category
- Article
- ISSN
- 1877-7058
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