✦ LIBER ✦
An X-ray photoelectron spectroscopic investigation into the chemical structure of deposits formed from hexamethyldisiloxane/ oxygen plasmas
✍ Scribed by M. R. Alexander; R. D. Short; F. R. Jones; M. Stollenwerk; J. Zabold; W. Michaeli
- Publisher
- Springer
- Year
- 1996
- Tongue
- English
- Weight
- 699 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0022-2461
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