An ultra-high-speed ECL-BiCMOS technology with silicon fillet self-aligned contacts

✍ Scribed by Liu, T.M.; Chin, G.M.; Jeon, D.Y.; Morris, M.D.; Archer, V.D., III; Johnson, R.W.; Tarsia, M.; Kim, H.H.; Cerullo, M.; Lee, K.F.; Sung, J.J.; Kei-Shun Lau; Tzu-Yin Chiu; Voshchenkov, A.M.; Swartz, R.G.

• Book ID: 114535870
• Publisher: IEEE
• Year: 1994
• Tongue: English
• Weight: 952 KB
• Volume: 41
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.310106