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An oxidized porous silicon (OPS) microlens implemented on thick OPS membrane for a silicon-based optoelectronic-multichip module (OE-MCM)

✍ Scribed by Man-Lyun Ha; Jae-Ho Kim; Sung-Ku Yeo; Young-Se Kwon


Book ID
119801180
Publisher
IEEE
Year
2004
Tongue
English
Weight
270 KB
Volume
16
Category
Article
ISSN
1041-1135

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