✦ LIBER ✦
An optical study of the correlation between growth kinetics and microstructure of μc-Si grown by SiH4-H2 PECVD
✍ Scribed by M.M. Giangregorio; M. Losurdo; A. Sacchetti; P. Capezzuto; F. Giorgis; G. Bruno
- Book ID
- 108060025
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 739 KB
- Volume
- 253
- Category
- Article
- ISSN
- 0169-4332
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