An optical pattern generator for large area devices and direct wafer stepping: A. D. Milne. Proc. Internepcon, UK '79 p. 288, Brighton (16–18 October 1979)

• Book ID: 103278859
• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 122 KB
• Volume: 20
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(80)90691-5