✦ LIBER ✦
An on-chip micro-friction tester for tribology research of silicon based MEMS devices
✍ Scribed by Zhanshe Guo; Yonggang Meng; Caijun Su; Hao Wu
- Publisher
- Springer-Verlag
- Year
- 2007
- Tongue
- English
- Weight
- 642 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0946-7076
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