✦ LIBER ✦
An O-ring sealed rotary feedthrough for uhv applications: A Pararas et al, J Vac Sci Technol, 21 (4), 1982, 1031
- Book ID
- 103466786
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 140 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0042-207X
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