An MOCVD Route to Barium Borate Thin Films from a Barium Hydro-tri(1-pyrazolyl)borate Single-Source Precursor

✍ Scribed by G. Malandrino; R. Lo Nigro; I. L. Fragalà

• Publisher: John Wiley and Sons
• Year: 2007
• Tongue: English
• Weight: 393 KB
• Volume: 13
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/cvde.200706611

✦ Synopsis

Abstract

BaB~2~O~4~ thin films are deposited by metal‐organic (MO)CVD using the barium(II) hydro‐tri(1‐pyrazolyl)borate, Ba[BH(pz)~3~]~2~, complex, that is tested for the first time as a single‐source precursor for the deposition of barium borate films. The related thermal analysis data reveal good volatility and high thermal stability with a low residue upon sublimation, despite the relatively high melting point (298.2 °C). Different BaB~2~O~4~ phases can be obtained depending on deposition temperatures. Films, deposited on Al~2~O~3~ (0001) substrates, are structurally and morphologically characterized by X‐ray diffraction (XRD), scanning electron microscopy (SEM), and X‐ray photoelectron spectroscopy (XPS).