✦ LIBER ✦
An ion-beam system for the sputtering of metals and insulators under high vacuum conditions: O Fiedler, G Reisse, B Schöneich and Ch Weissmantel, Institut für Technische Physik der TH Karl-Marx-Stadt, E Germany
- Publisher
- Elsevier Science
- Year
- 1968
- Tongue
- English
- Weight
- 117 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0042-207X
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