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An ion and electron multibeam system for three-dimensional microanalysis

✍ Scribed by K. Takanashi; H. Wu; Y. Kuramoto; Zh. H. Cheng; T. Sakamoto; M. Owari; Y. Nihei

Publisher: John Wiley and Sons
Year: 2000
Tongue: English
Weight: 429 KB
Volume: 30
Category: Article
ISSN: 0142-2421
DOI: 10.1002/1096-9918(200008)30:1<493::aid-sia765>3.0.co;2-3

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