An investigation of the temporal evolution of plasma potential in a 60 MHz/2 MHz pulsed dual-frequency capacitively coupled discharge

✍ Scribed by Mishra, Anurag; Jeon, Min Hwan; Kim, Kyong Nam; Yeom, Geun Young

• Book ID: 119969179
• Publisher: Institute of Physics
• Year: 2012
• Tongue: English
• Weight: 934 KB
• Volume: 21
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/21/5/055006