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An investigation of the interaction of N2O with the Si(111)-7×7 surface using AES and optical reflectometry; A comparison with O2

✍ Scribed by E.G. Keim; A. Van Silfhout

Publisher
Elsevier Science
Year
1985
Weight
56 KB
Volume
152-153
Category
Article
ISSN
0167-2584

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