✦ LIBER ✦
An investigation of the factors that influence the deposit/etch balance in a radiant-heated silicon epitaxial reactor : J. F. Corboy and R. Pagliaro, Jr.,RCA Rev.44, 231 (June 1983)
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 134 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0026-2714
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