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An investigation of the effects of the molecular weight distribution on the sensitivity of positive electron resists

✍ Scribed by Juey H. Lai; Lloyd Shepherd

Publisher: John Wiley and Sons
Year: 1976
Tongue: English
Weight: 475 KB
Volume: 20
Category: Article
ISSN: 0021-8995
DOI: 10.1002/app.1976.070200907

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