An investigation of laser ablation and deposition of Y-Ba-Cu-O in an oxygen environment
β Scribed by P.E. Dyer; A. Issa; P.H. Key
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 690 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0169-4332
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π SIMILAR VOLUMES
Y-Ba-Cu-O films were produced by reactive sputtering in 02 and N20 atmospheres using 248 nm KrF-laser radiation. For substrate temperatures Ts < 630 Β°C the superconducting properties of films fabricated in N20 are superior to those deposited in 02.
The composition of pulsed-ultraviolet-laser-deposited Y-Ba-Cu-O films was examined as a function of position across the substrate, laser fiuence, laser spot size, substrate temperature, target conditioning, oxygen pressure and target-substrate distance. Laser fluence, laser spot size, and substrate