An investigation of distribution parameters for fluorine ion implantation in indium-tin-oxide films

✍ Scribed by X. Liu; Y. Xia; F. Li; Z. Tan; B. Huang; M. Zhao; L. Ye; X. Xu

• Book ID: 106019336
• Publisher: Springer
• Year: 2005
• Tongue: English
• Weight: 647 KB
• Volume: 81
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-004-2670-6