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An investigation into the use of inorganic coatings for thin film photovoltaic modules

โœ Scribed by P. Longrigg


Publisher
Elsevier Science
Year
1989
Weight
790 KB
Volume
27
Category
Article
ISSN
0379-6787

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A sample oscillation module linked to a nanoindentation unit was used to perform nano-scale wear testing on a series of sputtered Cr doped amorphous C films deposited over a range of thicknesses (10, 20, 50, 150, and 2000 nm) under conditions relevant to MEMS and micro-scale engineering devices. A r