✦ LIBER ✦
An interatomic potential model for molecular dynamics simulation of silicon etching by Br[sup +]-containing plasmas
✍ Scribed by Ohta, H.; Iwakawa, A.; Eriguchi, K.; Ono, K.
- Book ID
- 127076051
- Publisher
- American Institute of Physics
- Year
- 2008
- Tongue
- English
- Weight
- 587 KB
- Volume
- 104
- Category
- Article
- ISSN
- 0021-8979
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