An integrated kinetic Monte Carlo molecular dynamics approach for film growth modeling and simulation: ZrO2 deposition on Si(1 0 0) surface

✍ Scribed by A.A. Knizhnik; A.A. Bagaturyants; I.V. Belov; B.V. Potapkin; A.A. Korkin

• Book ID: 117626699
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 188 KB
• Volume: 24
• Category: Article
• ISSN: 0927-0256
• DOI: 10.1016/s0927-0256(02)00174-x