✦ LIBER ✦
An inexpensive electron beam lithographic system and its application to monolithic circuit fabrication : B. N. Lyons. Microelectron. J.16 (6), 20 (1985)
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 129 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0026-2714
No coin nor oath required. For personal study only.