✦ LIBER ✦
An inertial piezoelectric step drive for subnanosize-accuracy movements
✍ Scribed by A. M. Lipanov; P. V. Gulyaev; E. Yu. Shelkovnikov; A. V. Tyurikov
- Book ID
- 110167787
- Publisher
- Springer
- Year
- 2009
- Tongue
- English
- Weight
- 171 KB
- Volume
- 52
- Category
- Article
- ISSN
- 0020-4412
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