An in situ transmission electron microscopy study of electron-beam-induced amorphous-to-crystalline transformation of Al2O3 films on silicon

✍ Scribed by Liu, J.; Barbero, C. J.; Corbett, J. W.; Rajan, K.; Leary, H.

• Book ID: 120057308
• Publisher: American Institute of Physics
• Year: 1993
• Tongue: English
• Weight: 550 KB
• Volume: 73
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.353757