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An in-plane low-noise accelerometer fabricated with an improved process flow

โœ Scribed by Xu-dong Zheng; Zhong-he Jin; Yue-lin Wang; Wei-jun Lin; Xiao-qi Zhou


Book ID
111841745
Publisher
SP Zhejiang University Press
Year
2009
Tongue
English
Weight
352 KB
Volume
10
Category
Article
ISSN
1009-3095

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