✦ LIBER ✦
An improved self-aligned silicide process for VLSI : Awatar Singh and W. S. Khokle. Microelectron. J.20(4), 11 (1989)
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 131 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0026-2714
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