An improved laser ablation method using a shadow mask (eclipse method)

✍ Scribed by Minoru Tachiki; Takeshi Kobayashi

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 421 KB
• Volume: 130
• Category: Article
• ISSN: 0424-7760
• DOI: 10.1002/(sici)1520-6416(200001)130:1<88::aid-eej11>3.0.co;2-l

✦ Synopsis

To eliminate droplet formation during the laser ablation thin film growth process, we proposed a new laser ablation technique, the eclipse method, which facilitated removing this droplet problem completely. In particular, YBa 2 Cu 3 O y films obtained by this method had T c ~93 K and droplet-free surfaces. To achieve growth rate enhancement in the low-pressure condition and to introduce the activated species on the substrate in the eclipse method, we further proposed a new composite shadow mask method, the eclipse angle method. Furthermore, we found the Ar addition effect to improve the film qualities of Bi-layered crystals.