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An improved ion assisted deposition technology for the 21st century

✍ Scribed by N.A.G. Ahmed

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 547 KB
Volume: 71
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(94)01003-2

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