✦ LIBER ✦

An improved bilayer PMGI(1) lithographic process

✍ Scribed by J.C. Guibert; M. Chevalier; P. Paniez; G. Amblard

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 756 KB
Volume: 6
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(87)90078-5

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