An improved altered layer model for ion assisted deposition under net sputtering erosion conditions

✍ Scribed by G Carter; IV Katardjiev; MJ Nobes

• Book ID: 103463863
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 839 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90096-1