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An experimental study on microcutting of silicon using a micromilling machine

✍ Scribed by Rusnaldy; Tae Jo Ko; Hee Sool Kim

Book ID: 105852435
Publisher: Springer
Year: 2007
Tongue: English
Weight: 345 KB
Volume: 39
Category: Article
ISSN: 0268-3768
DOI: 10.1007/s00170-007-1211-9

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