✦ LIBER ✦
An experimental study of ultrasonic vibration-assisted grinding of polysilicon using two-dimensional vertical workpiece vibration
✍ Scribed by Y. Peng; Y. B. Wu; Z. Q. Liang; Y. B. Guo; X. Lin
- Publisher
- Springer
- Year
- 2010
- Tongue
- English
- Weight
- 397 KB
- Volume
- 54
- Category
- Article
- ISSN
- 0268-3768
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