An Experimental Study of Fracture of LIGA Ni Micro-Electro-Mechanical Systems Thin Films

✍ Scribed by Y. Yang; S. Allameh; B. Boyce; K.S. Chan; W.O. Soboyejo

• Publisher: The Minerals, Metals & Materials Society
• Year: 2007
• Tongue: English
• Weight: 701 KB
• Volume: 38
• Category: Article
• ISSN: 1073-5623
• DOI: 10.1007/s11661-007-9147-0