An experimental investigation of angular resolved energy distributions of atoms sputtered from evaporated aluminum films

✍ Scribed by A. Goehlich; D. Gillmann; H.F. Döbele

• Book ID: 114164874
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 252 KB
• Volume: 179
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(01)00573-0