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An experimental and numerical study of particle nucleation and growth during low-pressure thermal decomposition of silane

✍ Scribed by Sandeep Nijhawan; Peter H McMurry; Mark T Swihart; Song-Moon Suh; Steven L Girshick; Stephen A Campbell; John E Brockmann

Book ID: 117129992
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 256 KB
Volume: 34
Category: Article
ISSN: 0021-8502
DOI: 10.1016/s0021-8502(03)00029-6

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