An experimental and numerical investigation into the effects of the PZT actuator shape in polymethylmethacrylate (PMMA) peristaltic micropumps

An experimental and numerical investigat

An experimental and numerical investigation into the effects of diffuser valves in polymethylmethacrylate (PMMA) peristaltic micropumps

✍ Yi-Chu Hsu; Jia-Hao Li; Ngoc-Bich Le 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 1013 KB

Utilizing micro-electromechanical systems (MEMS) techniques and a solvent-assisted bonding process, this study fabricates two peristaltic polymethylmethacrylate (PMMA) micropumps. In the first micropump, the actuation chambers are connected via straight microchannels with a uniform width and depth o