An evaluation of the composition of the residual atmosphere above a commercial dry pump: W Wong et al,J Vac Sci Technol,A6, 1988, 1183–1186

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 150 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90723-9