An evaluation of surface asperity profile changes in truncation processes using optical interferometric microscope

✍ Scribed by K Sasajima; K Naoi; T Tsukada

• Book ID: 108458029
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 540 KB
• Volume: 41
• Category: Article
• ISSN: 0890-6955
• DOI: 10.1016/s0890-6955(01)00056-6