✦ LIBER ✦
An evaluation of alternative precursors in chemical beam epitaxy: tris-dimethylaminoarsenic, tris-dimethylaminophosphorus, and tertiarybutylphosphine
✍ Scribed by N.Y. Li; H.K. Dong; W.S. Wong; C.W. Tu
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 381 KB
- Volume
- 164
- Category
- Article
- ISSN
- 0022-0248
No coin nor oath required. For personal study only.