An estimation of optimum Ar ion bombardment energy for good Fe films applying thermal spike effect

✍ Scribed by S. Iwatsubo; T. Takahashi; M. Naoe

• Book ID: 114086641
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 346 KB
• Volume: 343-344
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(98)01577-6