An energy analyzer for high-speed secondary electrons accelerated in inspection SEM imaging

✍ Scribed by A. Takafuji; H. Murakoshi; H. Shinada; M. Matsui; H. Nishiyama; M. Nozoe

• Book ID: 114155466
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 463 KB
• Volume: 61-62
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(02)00542-7